Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika home

Publication of the journal

The section is currently being updated

Currently the engineering and architectural solutions pertaining to development of automated control systems for specialized technological equipment based on domestic components are not standardized. Searching and application of universal technical solutions make it possible to reduce STE development time, to increase its reliability and decrease the hardware maintenance cost. In this work, the tasks arising during operation of automated processing equipment control systems at manufacturing site are considered, including the use of programmable logic controllers and specialized computing devices. The results of an analysis of modern hardware and software tools for designing control systems for specialized technological equipment are given. New engineering and architectural solutions are proposed and recommendations for their application in electronic engineering are provided. On the grounds of performed analysis, a unified structure for an automated control system based on distributed control system technologies is proposed, which can be used in the design or modernization of specialized technological equipment. The application of the proposed structure has been demonstrated through the development of an automated control system for an electron beam lithography installation. The results obtained can be used in the design of domestic specialized technological equipment.

Key words: automated control systems, programmable logic controller, distributed control systems, electron lithography
Published in: ELECTRONIC ENGINEERING
Bibliography link: Pereverzev А. L., Petrov V. F., Petrov O. V., Simonov S. B., Terentyev A. I. Automated control systems for technological equipment in electronic engineering. Izv. vuzov. Elektronika = Proc. Univ. Electronics. 2025;30(5):618–627. (In Russ.). https://doi.org/10.24151/1561-5405-2025-30-5-618-627.

Alexey L. Pereverzev
National Research University of Electronic Technology, (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Vladimir F. Petrov
National Research University of Electronic Technology, (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Oleg V. Petrov
National Research University of Electronic Technology, (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Alexey I. Terentev
National Research University of Electronic Technology, (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

1. Без своего электронного машиностроения не будет суверенной микроэлектроники. Российский форум «Микроэлектроника». 2015–2024. Available at: https://microelectronica.pro/news/forum_plenarnoe_zasedanie_4_20231012 (accessed: 25.06.2025).

Without own electronic engineering there will be no independent microelectronics. Rossiyskiy forum “Mikroelektronika”. 2015–2024. (In Russ.). Available at: https://microelectronica.pro/news/forum_plenarnoe_zasedanie_4_20231012 (accessed: 25.06.2025).

2. Макеев А. С. Анализ АСУ ТП дожимной насосной станции в рамках процесса управления рисками ИБ. In: Технические науки: теория и практика: материалы III Междунар. науч. конф. (г. Чита, 20–23 апреля 2016 г.). Чита: Молодой ученый; 2016, с. 9–15. EDN: VYIAMJ.

Makeev A. S. Analysis of APCS of booster pump station as part of information security risk management. In: Tekhnicheskie nauki: teoriya i praktika: proc. of 3rd International sci. conf. (Chita, Apr. 20–23, 216). Chita: Molodoy uchenyy Publ.; 2016, pp. 9–15. (In Russ.).

3. Automation Mall: online platform. Available at: https://www.otomasyonavm.com (accessed: 17.03.2025).

4. Yokogawa Electric Corporation. Available at: https://www.yokogawa.com/ (accessed: 25.06.2025).

5. B&R Industrial Automation. Available at: https://www.br-automation.com (accessed: 17.03.2025).

6. SIMATIC PCS 7 – the distributed control system with proven performance. Siemens Global. Available at: https://www.siemens.com/global/en/products/automation/process-control/simatic-pcs-7.html (accessed: 25.06.2025).

7. Открытая АСУ ТП: межотраслевая рабочая группа. Available at: https://openapc.ru/ (accessed: 25.06.2025).

Open Automated Process Control System: interindustry workgroup. (In Russ.). Available at: https://openapc.ru/ (accessed: 25.06.2025).

8. Ассоциация предприятий «Электронное машиностроение». Available at: https://elmashrussia.ru/ (accessed: 25.06.2025).

“Electronic Engineering” Industry Association. (In Russ.). Available at: https://elmashrussia.ru/ (accessed: 25.06.2025).

9. Modicon: popular PLCs since 1968. Schneider Electric India. Available at: https://www.se.com/in/en/about-us/events/modicon.jsp (accessed: 25.06.2025).

10. ОВЕН: оборудование для автоматизации. Available at: https://owen.ru (accessed: 25.06.2025).

OWEN: automation equipment. (In Russ.). Available at: https://owen.ru (accessed: 25.06.2025).

11. НИЦ «Курчатовский институт» – НИИСИ. Available at: https://www.niisi.ru/ (accessed: 25.06.2025).

NRC “Kurchatov Institute” – SRISA. (In Russ.). Available at: https://www.niisi.ru/ (accessed: 25.06.2025).

12. ИНЭУМ им. И. С. Брука. Available at: http://www.ineum.ru/ (accessed: 25.06.2025).

INEUM n. a. I. S. Bruk. (In Russ.). Available at: http://www.ineum.ru/ (accessed: 25.06.2025).

13. Beremiz Project’s Homepage. Available at: https://beremiz.org/ (accessed: 25.06.2025).

14. Hartner F., Fischer M. Software-defined automation: Part 1 – Living on the (industrial) edge. Siemens Blog. 17.09.2024. Available at: https://blog.siemens.com/2024/09/software-defined-automation-part-1-living-on-the-industrial-edge/ (accessed: 25.06.2025).

15. Решение для виртуальной безопасности от CODESYS получило сертификацию. Современная электроника и технологии автоматизации. 30.01.2025. Available at: https://www.cta.ru/news/cta/181039.html (accessed: 25.06.2025).

Virtual safety solution from CODESYS has been certified. Automation.com. 29.01.2025. Available at: https://www.automation.com/en-us/articles/january-2025/codesys-virtual-safety-solution-certified (accessed: 25.06.2025).

16. Хамфри Д. Виртуальный ПЛК – следующий шаг в цифровой трансформации архитектур автоматизации. МЗТА. Available at: https://www.mzta.ru/o-kompanii/stati/virtualnyj-plk-sleduyushchij-shag-v-tsifrovoj-transformatsii-ar... (accessed: 25.06.2025).

Humphrey D. Virtual PLC: The next step in digital transformation of automation architectures. LinkedIn. 02.05.2024. Available at: https://www.linkedin.com/pulse/virtual-plc-next-step-digital-transformation-david-humphrey-ofnif/ (accessed: 25.06.2025).

17. SEMI: Fostering global collaboration in the semiconductor industry. Available at: https://www.semi.org/en (accessed: 25.06.2025).

Information about the publication

UDK: 681.5
Publication type: Scientific article
Source lang: Russian
DOI: 10.24151/1561-5405-2025-30-5-618-627
RISC id: VHVVHO

JATS XML